Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

From LabAdviser
Jump to navigation Jump to search
No edit summary
No edit summary
Line 17: Line 17:
! width="100" | Key words
! width="100" | Key words
|-
|-
! mediumiso1   <!-- recipe name -->
! Mediumiso1   <!-- recipe name -->
| -        <!-- step -->
| -        <!-- step -->
| 20      <!-- chiller temp -->
| 20      <!-- chiller temp -->

Revision as of 10:06, 24 June 2016


Mediumiso
Recipe Step Temperature Pressure C4F8 SF6 O2 Ar Coil Platen Runs Key words
Mediumiso1 - 20 25 0 150 0 0 600 3 1 NA
Isoslow7 - 10 10 0 80 0 0 150 3 1
-
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic&oldid=24182"