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Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
No edit summary
Line 31: Line 31:
|-
|-
! Isoslow7      <!-- recipe name -->
! Isoslow7      <!-- recipe name -->
|       <!-- step -->
| -      <!-- step -->
| 10        <!-- chiller temp -->
| 10        <!-- chiller temp -->
| 10      <!-- pressure -->
| 10      <!-- pressure -->
|       <!-- C4F8 flow -->
| 0      <!-- C4F8 flow -->
| 80      <!-- SF6 flow -->
| 80      <!-- SF6 flow -->
|       <!-- O2 flow -->
| 0      <!-- O2 flow -->
| 0      <!-- Ar flow -->
| 150      <!-- coil power -->
| 150      <!-- coil power -->
| 3      <!-- platen power -->
| 3      <!-- platen power -->
Line 49: Line 50:
|        <!-- SF6 flow -->
|        <!-- SF6 flow -->
|        <!-- O2 flow -->
|        <!-- O2 flow -->
|      <!-- Ar flow -->
|        <!-- coil power -->
|        <!-- coil power -->
|        <!-- platen power -->
|        <!-- platen power -->
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