Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
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|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]] <!-- link processes --> | |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]] <!-- link processes --> | ||
| NA <!-- keywords --> | | NA <!-- keywords --> | ||
|- | |||
! Isoslow7 <!-- recipe name --> | |||
| <!-- step --> | |||
| 10 <!-- chiller temp --> | |||
| 10 <!-- pressure --> | |||
| <!-- C4F8 flow --> | |||
| 80 <!-- SF6 flow --> | |||
| <!-- O2 flow --> | |||
| 150 <!-- coil power --> | |||
| 3 <!-- platen power --> | |||
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7|1]] <!-- link processes --> | |||
| <!-- keywords --> | |||
|- | |- | ||
! - <!-- recipe name --> | ! - <!-- recipe name --> | ||
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| <!-- keywords --> | | <!-- keywords --> | ||
|- | |- | ||
|} | |} | ||