Specific Process Knowledge/Etch/DRIE-Pegasus/processA/PrA-1: Difference between revisions

From LabAdviser
Newer edit →
VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,416 edits
Created page with " {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="2" width="120"| Substrate Informa..."
 
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,416 edits
No edit summary
Line 22: Line 22:
| C03991.02
| C03991.02
|  
|  
[[file:C03991.02 083.jpg|150px|frameless ]]
[[file:C03991.02 084.jpg|150px|frameless ]]
[[file:C03991.02 085.jpg|150px|frameless ]]
[[file:C03991.02 086.jpg|150px|frameless ]]
[[file:C03991.02 086.jpg|150px|frameless ]]
[[file:C03991.02 087.jpg|150px|frameless ]]
[[file:C03991.02 087.jpg|150px|frameless ]]
Line 37: Line 40:
[[file:C03991.02 099.jpg|150px|frameless ]]
[[file:C03991.02 099.jpg|150px|frameless ]]
[[file:C03991.02 100.jpg|150px|frameless ]]
[[file:C03991.02 100.jpg|150px|frameless ]]
[[file:C03991.02 083.jpg|150px|frameless ]]
[[file:C03991.02 084.jpg|150px|frameless ]]
[[file:C03991.02 085.jpg|150px|frameless ]]
|-
|-
| 2/5-2016
| 2/5-2016
Line 50: Line 48:
| C03991.05
| C03991.05
|  
|  
[[file:C03991.05 137.jpg|150px|frameless ]]
[[file:C03991.05 138.jpg|150px|frameless ]]
[[file:C03991.05 139.jpg|150px|frameless ]]
[[file:C03991.05 140.jpg|150px|frameless ]]
[[file:C03991.05 141.jpg|150px|frameless ]]
[[file:C03991.05 142.jpg|150px|frameless ]]
[[file:C03991.05 143.jpg|150px|frameless ]]
[[file:C03991.05 144.jpg|150px|frameless ]]
[[file:C03991.05 144.jpg|150px|frameless ]]
[[file:C03991.05 145.jpg|150px|frameless ]]
[[file:C03991.05 145.jpg|150px|frameless ]]
Line 58: Line 63:
[[file:C03991.05 150.jpg|150px|frameless ]]
[[file:C03991.05 150.jpg|150px|frameless ]]
[[file:C03991.05 151.jpg|150px|frameless ]]
[[file:C03991.05 151.jpg|150px|frameless ]]
[[file:C03991.05 137.jpg|150px|frameless ]]
[[file:C03991.05 138.jpg|150px|frameless ]]
[[file:C03991.05 139.jpg|150px|frameless ]]
[[file:C03991.05 140.jpg|150px|frameless ]]
[[file:C03991.05 141.jpg|150px|frameless ]]
[[file:C03991.05 142.jpg|150px|frameless ]]
[[file:C03991.05 143.jpg|150px|frameless ]]
|-
|-
| 3/6-2016
| 3/6-2016
Line 74: Line 71:
| C04047.02
| C04047.02
|  
|  
[[file:C04047.02 096.jpg|150px|frameless ]]
[[file:C04047.02 095.jpg|150px|frameless ]]
[[file:C04047.02 094.jpg|150px|frameless ]]
[[file:C04047.02 093.jpg|150px|frameless ]]
[[file:C04047.02 092.jpg|150px|frameless ]]
[[file:C04047.02 091.jpg|150px|frameless ]]
[[file:C04047.02 090.jpg|150px|frameless ]]
[[file:C04047.02 089.jpg|150px|frameless ]]
[[file:C04047.02 088.jpg|150px|frameless ]]
[[file:C04047.02 087.jpg|150px|frameless ]]
[[file:C04047.02 086.jpg|150px|frameless ]]
[[file:C04047.02 086.jpg|150px|frameless ]]
[[file:C04047.02 087.jpg|150px|frameless ]]
[[file:C04047.02 085.jpg|150px|frameless ]]
[[file:C04047.02 088.jpg|150px|frameless ]]
[[file:C04047.02 084.jpg|150px|frameless ]]
[[file:C04047.02 089.jpg|150px|frameless ]]
[[file:C04047.02 090.jpg|150px|frameless ]]
[[file:C04047.02 091.jpg|150px|frameless ]]
[[file:C04047.02 092.jpg|150px|frameless ]]
[[file:C04047.02 093.jpg|150px|frameless ]]
[[file:C04047.02 094.jpg|150px|frameless ]]
[[file:C04047.02 095.jpg|150px|frameless ]]
[[file:C04047.02 096.jpg|150px|frameless ]]
[[file:C04047.02 083.jpg|150px|frameless ]]
[[file:C04047.02 083.jpg|150px|frameless ]]
[[file:C04047.02 084.jpg|150px|frameless ]]
[[file:C04047.02 085.jpg|150px|frameless ]]
|-
|-
| 3/6-2016
| 3/6-2016
Line 96: Line 93:
| C04047.05
| C04047.05
|  
|  
[[file:C04047.05 132.jpg|150px|frameless ]]
[[file:C04047.05 133.jpg|150px|frameless ]]
[[file:C04047.05 134.jpg|150px|frameless ]]
[[file:C04047.05 135.jpg|150px|frameless ]]
[[file:C04047.05 136.jpg|150px|frameless ]]
[[file:C04047.05 137.jpg|150px|frameless ]]
[[file:C04047.05 138.jpg|150px|frameless ]]
[[file:C04047.05 124.jpg|150px|frameless ]]
[[file:C04047.05 124.jpg|150px|frameless ]]
[[file:C04047.05 125.jpg|150px|frameless ]]
[[file:C04047.05 125.jpg|150px|frameless ]]
Line 111: Line 101:
[[file:C04047.05 130.jpg|150px|frameless ]]
[[file:C04047.05 130.jpg|150px|frameless ]]
[[file:C04047.05 131.jpg|150px|frameless ]]
[[file:C04047.05 131.jpg|150px|frameless ]]
 
[[file:C04047.05 132.jpg|150px|frameless ]]
[[file:C04047.05 133.jpg|150px|frameless ]]
[[file:C04047.05 134.jpg|150px|frameless ]]
[[file:C04047.05 135.jpg|150px|frameless ]]
[[file:C04047.05 136.jpg|150px|frameless ]]
[[file:C04047.05 137.jpg|150px|frameless ]]
[[file:C04047.05 138.jpg|150px|frameless ]]
|-
|-
|}
|}

Revision as of 11:36, 16 June 2016


Process runs
Date Substrate Information Process Information SEM Images
Wafer info Exposed area Conditioning Recipe Wafer ID
2/5-2016 4" Travka20 Wafer 20 % Si 3 minute TDESC clean PrA-1, 80 cycles or 14:40 minutes C03991.02

2/5-2016 4" Travka20 Wafer 20 % Si 3 minute TDESC clean PrA-1, 80 cycles or 14:40 minutes C03991.05

3/6-2016 4" Travka20 Wafer 20 % Si 3 minute TDESC clean PrA-1, 80 cycles or 14:40 minutes C04047.02

3/6-2016 4" Travka20 Wafer 20 % Si 3 minute TDESC clean PrA-1, 80 cycles or 14:40 minutes C04047.05

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA/PrA-1&oldid=24087"