Specific Process Knowledge/Etch/Etching of Bulk Glass: Difference between revisions
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* Piranha clean | * Piranha clean | ||
* Bake-out at 250 C (>2,5 hours) | * Bake-out at 250 C (>2,5 hours) | ||
* | * Plasma ashing | ||
* | |||
40% HF 3µm/min | 40% HF 3µm/min | ||