Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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|style="background:Whitesmoke; color:black" colspan="5" align="center"| The resolution of a SEM is strongly dependent on sample type and the operator. Resolution quoted is using sputtered gold on carbon | |style="background:Whitesmoke; color:black" colspan="5" align="center"| The resolution of a SEM is strongly dependent on sample type and the operator. Resolution quoted is using sputtered gold on carbon | ||
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* High-vacuum | |||
•3.0nm at 30kV (SE) | |||
•10nm at 3kV (SE) | |||
•4.0nm at 30kV (BSE) | |||
* Low-vacuum | |||
•3.0nm at 30kV (SE) | |||
• 4.0nm at 30kV (BSE) | |||
• > 12nm at 3kV (SE) | |||
|B | |B | ||
|C | |C | ||
|D | |D | ||
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* Electron Column | |||
•0.8nm @15kV | |||
•0.9nm @1kV | |||
* Ion Column | |||
•4.5nm @ 30kV | |||
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