Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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== E-beam resists in the cleanroom == | == E-beam resists in the cleanroom == | ||
[[File:bottle.jpg| | [[File:bottle.jpg|150px|right]] | ||
We recommend all groups or users to have their own bottle of e-beam resist inside the cleanroom. | We recommend all groups or users to have their own bottle of e-beam resist inside the cleanroom. | ||
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* Bring the (main) bottle of resist to the fumehood. Carefully unscrew the lid of the resist bottle. '''If necessary, wipe the thread of the resist bottle before you pour resist into your own bottle'''; dried resists may sit on the thread and be transferred into your bottle (or worse into the large resist bottle) when pouring. | * Bring the (main) bottle of resist to the fumehood. Carefully unscrew the lid of the resist bottle. '''If necessary, wipe the thread of the resist bottle before you pour resist into your own bottle'''; dried resists may sit on the thread and be transferred into your bottle (or worse into the large resist bottle) when pouring. | ||
* Clean all bottles on the outside with anisole or IPA, let them fume off in the fumehood. Clean the measurement beaker as well. | * Clean all bottles on the outside with anisole or IPA, let them fume off in the fumehood. Clean the measurement beaker as well. | ||
* Find a label to your resist bottle; bottles without labels will be removed from the cleanroom. | |||
When spin coating e-beam resist, you should use a pipette to transfer resist from your bottle to the substrate. If you pour the resist directly from your bottle, you will leave resist in the thread that will soon dry out and leave particles in the resist. | When spin coating e-beam resist, you should use a pipette to transfer resist from your bottle to the substrate. If you pour the resist directly from your bottle, you will leave resist in the thread that will soon dry out and leave particles in the resist. | ||