Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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We recommend all groups or users to have their own bottle of e-beam resist inside the cleanroom. | We recommend all groups or users to have their own bottle of e-beam resist inside the cleanroom. | ||
* Find a blue-capped bottle in the cupboard next to office in 346 (outside the cleanroom). The cupboard says | * Find a blue-capped glass bottle in the cupboard next to office in 346 (outside the cleanroom). The cupboard says | ||
* Bring the bottle inside gowning; clean it thoroughly '''on the outside''' with water or alcohol | * Bring the bottle inside gowning; clean it thoroughly '''on the outside''' with water or alcohol | ||
* Bring the bottle to a fumehood inside the cleanroom; clean | * Bring the bottle to a fumehood inside the cleanroom; clean the bottle and the lid thoroughly '''on the inside''' with the main solvent of your resist. For CSAR, ZEP, mr EBL, and most PMMAs, it is anisole. If in doubt which solvent your e-beam resist is diluted in, read the MSDS of the resist to be found [http://kemibrug.dk/searchpage/ here]. | ||
* If you need to dilute the resist, find a measurement beaker and clean it thorughly in same solvent as your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the fumehood in D-3. | |||
* Let the bottle dry in the fumehood. | |||
* Bring the (main) bottle of resist to the fumehood. Carefully unscrew the lid of the resist bottle. '''If necessary, wipe the thread of the resist bottle before you pour resist into your own bottle'''; dried resists may sit on the thread and be transferred into your bottle (or worse into the large resist bottle) when pouring. | |||
* Clean all bottles on the outside with anisole or IPA, let them fume off in the fumehood. Clean the measurement beaker as well. | |||
== E-beam resists and Process flow == | == E-beam resists and Process flow == | ||