Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

Revision as of 12:48, 3 June 2016

**Mediumiso**
Recipe	Step	Temp.	Deposition step						Etch step							Process observations
Recipe	Step	Temp.	Time	Pres.	C₄F₈	SF₆	O₂	Coil	Time	Pres.	C₄F₈	SF₆	O₂	Coil	Platen	HW	Runs	Key words
mediumiso1	-	20	NA	NA	NA	NA	NA	NA	NA	25	0	150	0	600	3	-	1	NA
-

@@ Line 65: / Line 65: @@
 |      <!-- link processes -->
 |      <!-- keywords -->
+|-
+|}
+{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
+|+ '''Mediumiso'''
+|-
+! width="50"| Recipe
+! width="50"| Step
+! width="50"| Temperature
+! width="50"| Time
+! width="50"| Pressure
+! width="50"| C<sub>4</sub>F<sub>8</sub>
+! width="50"| SF<sub>6</sub>
+! width="50"| O<sub>2</sub>
+! width="50"| Ar
+! width="50"| Coil
+! width="50"| Platen
+! colspan="2" | Process observations
+|-
+! Runs
+! width="100" | Key words
+|-
+! mediumiso1    <!-- recipe name -->
+| -        <!-- step -->
+| 20       <!-- chiller temp -->
+| NA       <!-- time -->
+| 25       <!-- pressure -->
+| 0        <!-- C4F8 flow -->
+| 150      <!-- SF6 flow -->
+| 0        <!-- O2 flow -->
+| 600       <!-- coil power -->
+| 3      <!-- platen power -->
+| [[Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 | 1]]       <!-- link processes -->
+| NA     <!-- keywords -->
+|-
+!        <!-- recipe name -->
+|        <!-- step -->
+|        <!-- chiller temp -->
+|        <!-- time -->
+|        <!-- pressure -->
+|        <!-- C4F8 flow -->
+|        <!-- SF6 flow -->
+|        <!-- O2 flow -->
+|        <!-- coil power -->
+|        <!-- platen power -->
+|        <!-- link processes -->
+|        <!-- keywords -->
 |-
 |}