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Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 101: Line 101:
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/Parameters#Hardware | HW]]  
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/Parameters#Hardware | HW]]  
! width="40" | Runs
! width="40" | Runs
! width="100" | Key words
! width="300" | Key words
|-
|-
! polySOI-10    <!-- recipe name -->
! polySOI-10    <!-- recipe name -->
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