Specific Process Knowledge/Bonding/Anodic bonding: Difference between revisions
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==Anodic Bonding== | ==Anodic Bonding== | ||
Anodic bonding can only occur between a Silicon wafer and a Pyrex glass, not a quartz (fused silica). | |||
Revision as of 15:02, 10 March 2008
Anodic Bonding
Anodic bonding can only occur between a Silicon wafer and a Pyrex glass, not a quartz (fused silica).