LabAdviser/Technology Research/Microfabrication of Hard x-ray Lenses: Difference between revisions
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===Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses=== | ===Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses=== | ||
Stöhr F, Michael-Lindhard J, Hübner J, Jensen F, Simons H, Jakobsen A C, Poulsen H F and Hansen O. 2015 Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses. Journal of Vacuum Science and Technology B 33(6), 062001 [http://dx.doi.org/10.1116/1.4931622 LINK] | Stöhr F, Michael-Lindhard J, Hübner J, Jensen F, Simons H, Jakobsen A C, Poulsen H F and Hansen O. 2015 Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon X-ray lenses. Journal of Vacuum Science and Technology B 33(6), 062001 [http://dx.doi.org/10.1116/1.4931622 LINK] | ||
===Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy=== | ===Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy=== | ||