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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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*[[Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch|SOI etch]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch|SOI etch]]
'''Hardware changes'''
A few hardware modifications have been made on the Pegasus since it was installed in 2010. The changes are listed below.
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|Change of showerhead in December 2014]]


'''Other etch processes'''
'''Other etch processes'''
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus"