Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
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==Low temperature grown multilayers on flat surfaces== | ==Low temperature grown multilayers on flat surfaces== | ||
Recipe: EMA01 | <b>Recipe: EMA01</b> | ||
Recipe: EMA02 | <b>Recipe: EMA02</b> | ||
Recipe: EMA03 | <b>Recipe: EMA03</b> | ||
Recipe: EMA04 | <b>Recipe: EMA04</b> | ||
<b>Temperature: 120 <sup>o</sup>C</b> | <b>Temperature: 120 <sup>o</sup>C</b> | ||
All four recipes is based on <b>Al2O3_LT</b> amd <b>TiO2_LT</b> above mentioned low temperature recipes. | |||
<gallery caption="" widths="1000px" heights="700px" perrow="1"> | <gallery caption="" widths="1000px" heights="700px" perrow="1"> | ||