Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
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image:Al2O3_TiO2_flat_multilayers. | image:Al2O3_TiO2_flat_multilayers.jpg| Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> multilayers grown on silicon trenches. | ||
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<b>Evgeniy Shkondin, DTU Danchip, 2014-2016.</b> | |||
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==Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> multilayers on high aspect ratio structures== | ==Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> multilayers on high aspect ratio structures== | ||