Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

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==Low temperature deposition of Al<sub>2</sub>O<sub>3</sub>==
==Low temperature deposition of Al<sub>2</sub>O<sub>3</sub>==


Recipe: Al2O3LT
<b>Recipe: Al2O3 LT</b>


Temperature:80-150 <sup>o</sup>C
<b>Temperature:80-150 <sup>o</sup>C</b>


{| border="2" cellspacing="2" cellpadding="5"  align="none"
{| border="2" cellspacing="2" cellpadding="5"  align="none"
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!Pulse time
!Pulse time
|0.1 s
|0.1 s
|0.1 s
|0.2 s
|-  
|-  
!Purge time
!Purge time
|3.0 s
|5.0 s
|4.0 s
|10.0 s
|-
|-
|}
|}


Deposition rate: <b>0.085-0.097 nm/cycle </b>(temperature dependent)
Deposition rate: <b>0.089 nm/cycle </b>(@120 <sup>o</sup>C)


==Low temperature deposition of TiO<sub>2</sub>==
==Low temperature deposition of TiO<sub>2</sub>==

Revision as of 16:33, 19 May 2016

This page describes non standart recipes including multilayers structures.

Low temperature deposition of Al2O3

Recipe: Al2O3 LT

Temperature:80-150 oC

TMA H2O
Nitrogen flow 150 sccm 200 sccm
Pulse time 0.1 s 0.2 s
Purge time 5.0 s 10.0 s

Deposition rate: 0.089 nm/cycle (@120 oC)

Low temperature deposition of TiO2

Recipe: TiO2 LT

Temperature: 80-150 oC

TiCl4 H2O
Nitrogen flow 150 sccm 200 sccm
Pulse time 0.2 s 0.2 s
Purge time 10.0 s 15.0 s

Deposition rate: 0.048 nm/cycle (@ 120 oC)

Low temperature grown multilayers on flat surfaces

Recipe: EMA01

Recipe: EMA02

Recipe: EMA03

Recipe: EMA04

Temperature: 120 oC

Al2O3/TiO2 multilayers on high aspect ratio structures

Recipe: Multi T

Temperature: 150 oC