Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
| Line 11: | Line 11: | ||
Recipe: TiO2LT | Recipe: TiO2LT | ||
Temperature: 80- | Temperature: 80-150<sup>o</sup>C | ||
==Low temperature grown multilayers on flat surfaces== | ==Low temperature grown multilayers on flat surfaces== | ||