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Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Temperature: 120C
Temperature: 120C


==Al2O3/TiO2 multilayers on high aspect ratio structures==
==Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> multilayers on high aspect ratio structures==


Recipe: Multi T
Recipe: Multi T


Temperature: 150C
Temperature: 150C
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