Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
| Line 13: | Line 13: | ||
Temperature: 80-150C | Temperature: 80-150C | ||
== | ==Low temperature grown multilayers on flat surfaces== | ||
Recipe: EMA01 | Recipe: EMA01 | ||
Revision as of 15:12, 19 May 2016
This page describes non standart recipes including multilayers structures.
Low temperature deposition of Al2O3
Recipe: Al2O3LT
Temperature:80-150C
Low temperature deposition of TiO2
Recipe: TiO2LT
Temperature: 80-150C
Low temperature grown multilayers on flat surfaces
Recipe: EMA01
Recipe: EMA02
Recipe: EMA03
Recipe: EMA04
Temperature: 120C
Al2O3/TiO2 multilayers on high aspect ratio structures
Recipe: Multi T
Temperature: 150C