Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

Revision as of 14:11, 19 May 2016

This page describes non standart recipes including multilayers structures.

Recipe: Al2O3LT

Temperature:80-150C

Recipe: TiO2LT

Temperature: 80-150C

Recipe: EMA01

Recipe: EMA02

Recipe: EMA03

Recipe: EMA04

Temperature: 120C

Recipe: Multi T

Temperature: 150C

Revision as of 14:11, 19 May 2016 view source Eves (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 3,786 edits →‎Flat Low temperature grown multilayers ← Older edit		Revision as of 14:11, 19 May 2016 view source Eves (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 3,786 edits →‎Al2O3/TiO2 multilayers on high aspect ratio structures Newer edit →
Line 29:		Line 29:
	Recipe: Multi T		Recipe: Multi T

	Temperature: ~~120C~~		Temperature: 150C