Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
No edit summary |
|||
| Line 16: | Line 16: | ||
Recipe: EMA01 | Recipe: EMA01 | ||
Recipe: EMA02 | Recipe: EMA02 | ||
Recipe: EMA03 | Recipe: EMA03 | ||
Recipe: EMA04 | Recipe: EMA04 | ||
Temperature: 120C | |||
==Al2O3/TiO2 multilayers on high aspect ratio structures== | |||
Recipe: Multi T | |||
Temperature: 120C | Temperature: 120C | ||