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Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

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Created page with "This page describes non standartv Al2O3 and tiO2 processes including multilayers structures"
 
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This page describes non standartv Al2O3 and tiO2 processes including multilayers structures
This page describes non standart recipes including multilayers structures.
 
==Low temperature deposition of Al<sub>2</sub>O<sub>3</sub>==
 
Recipe: Al2O3LT
 
Temperature:80-150C
 
==Low temperature deposition of TiO<sub>2</sub>==
 
Recipe: TiO2LT
 
Temperature: 80-150C
 
==Flat Low temperature grown multilayers==
 
Recipe: EMA01
Recipe: EMA02
Recipe: EMA03
Recipe: EMA04
 
Temperature: 120C
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