Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
Appearance
| Line 231: | Line 231: | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black" colspan="2"| | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
Development of DUV resist: KRF | Development of DUV resist: KRF M230Y and KRF M35G | ||
|- | |- | ||