Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
*100 mm wafers | *100 mm wafers (in trays) | ||
*150 mm wafers | *150 mm wafers | ||
*200 mm wafers | *200 mm wafers (requires tool change) | ||
|- | |- | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||