Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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*100 mm wafers | *100 mm wafers | ||
*150 mm wafers | *150 mm wafers | ||
*200 mm wafers | *200 mm wafers (requires tool change) | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||