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Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,527 edits
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'''Standard processes:'''
'''Standard processes:'''
BARC DUV42s-6
BARC DUV42s-6
*'''(1001) DCH 150mm BARC 65nm''' Dispense 3ml@1000rpm; spin-off 60s@4700rpm; softbake 60s@175°C
*'''(1001) DCH 150mm BARC 65nm''' Dispense 3ml@1000rpm; spin-off 60s@4700rpm; softbake 60s@175°C
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