Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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'''Standard processes:''' | '''Standard processes:''' | ||
*( | *'''(1001) DCH 150mm BARC 65nm''' ... | ||
*'''(1002) DCH 100mm BARC 65nm''' | |||
*'''(1011) DCH 150mm M230Y 360nm''' | |||
*'''(1012) DCH 100mm M230Y 360nm''' | |||
*'''(1021) DCH 150mm M35G 750nm''' | |||
*'''(1022) DCH 100mm M35G 750nm''' | |||
*'''(1023) DCH 150mm M35G 1000nm''' | |||
*'''(1024) DCH 100mm M35G 1000nm''' | |||
*'''(1025) DCH 150mm M35G 1400nm''' | |||
*'''(1026) DCH 100mm M35G 1400nm''' | |||
== Equipment performance and process related parameters == | == Equipment performance and process related parameters == | ||