Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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*water rinse with BSR (5s @ 3000rpm) | *water rinse with BSR (5s @ 3000rpm) | ||
*nitrogen drying (7s @ 4000rpm) | *nitrogen drying (7s @ 4000rpm) | ||
and has a cycle time of ~2 minutes | |||
<br clear="all" /> | <br clear="all" /> | ||