Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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0,4 - 0,60 | 0,4 - 0,60 | ||
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|style="background:LightGrey; color:black"|Illumination system's sigma | |style="background:LightGrey; color:black"|Illumination system's σ | ||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
0,2 - 0,75 (standard illumination mode: sigma = 0,65) | 0,2 - 0,75 (standard illumination mode: σ = 0,65) | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Exposure source | |style="background:LightGrey; color:black"|Exposure source | ||