Specific Process Knowledge/Characterization/SEM LEO: Difference between revisions
No edit summary |
|||
| Line 5: | Line 5: | ||
=SEM LEO= | =SEM LEO= | ||
[[image:IMG_3290.jpg|400x400px|right|thumb|The SEM LEO]] | [[image:IMG_3290.jpg|400x400px|right|thumb|The SEM LEO located in cleanroom F-2]] | ||
The SEM LEO is a scanning electron microscope. It is a very reliable and rugged instrument that provides high quality SEM images of most samples, and it has excellently served the users of the cleanroom for many years. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the SEM. | The SEM LEO is a scanning electron microscope. It is a very reliable and rugged instrument that provides high quality SEM images of most samples, and it has excellently served the users of the cleanroom for many years. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the SEM. | ||