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SEM Supra 2

The SEM Supra 2 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.

The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.

This SEM has large chamber volume compared to the other SEMs at Danchip. An 8" wafer can be loaded in the chamber, however the X and Y ranges only provide full view of a 6" wafer.

All samples must be introduced into the chamber using an airlock. The airlock greatly reduces sample exchange times, and it accepts up to 8" wafer holders.

The SEM is equipped with an Oxford Instruments X-MaxN 50 EDX detector and AZtec software. EDX (Energy dispersive X-ray) detection is used for element composition analysis in a small area. A specific training is needed for users that want to use the EDX detector.

The SEM Supra2 in located in the cleanroom. It was installed in December 2013.

The user manual, control instruction, the user APV and contact information can be found in LabManager:

SEM Supra 2 info page in LabManager

Equipment performances

Equipment		SEM Supra 2 (Supra 60VP SEM)
Purpose	Imaging and measurement of	Any sample except bulk insulators such as polymers, glass or quartz wafers
Location		Cleanroom of DTU Danchip
Performance	Resolution	1-2 nm (limited by vibrations) The resolution is strongly dependent on the type of sample and the skills of the operator.
Instrument specifics	Detectors	Secondary electron (Se2) Inlens secondary electron (Inlens) 4 Quadrant Backscatter electron (QBSD) Variable pressure secondary electron (VPSE)
	Stage	X, Y: 150 × 150 mm T: -10 to 70^o R: 360^o Z: 50 mm
	Electron source	FEG (Field Emission Gun) source
	Operating pressures	Fixed at High vacuum (2 × 10^-4mbar - 10^-6mbar) Variable at Low vacuum (0.1 mbar - 2 mbar)
	Options	Antivibration platform Fjeld M-200 airlock taking up to 8" wafers Oxford Instruments X-Max^N 50 mm² SDD EDX detector and AZtec software package
Substrates	Batch size	Up to 8" wafer with 6" view
	Allowed materials	Any standard cleanroom material

@@ Line 8: / Line 8: @@
 [[image:LA_SEM_Supra_1.jpg|400x400px|right|thumb|The SEM Supra 1]]
-=SEM Supra 1=
+=SEM Supra 2=
-The SEM Supra 1 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.
+The SEM Supra 2 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.
 The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.
-The SEM is the training SEM at DTU Danchip. It means that all new SEM users with no or little SEM experience must be trained on this tool and gain basic knowledge here before being qualified for training on other SEM's.
+This SEM has large chamber volume compared to the other SEMs at Danchip. An 8" wafer can be loaded in the chamber, however the X and Y ranges only provide full view of a 6" wafer.
-The SEM Supra 1 was installed in the cleanroom in November 2010, but it has now been relocated in the basement outside the cleanroom, so that users can avoid to clean samples that have been outside the cleanroom before SEM inspection.
+All samples must be introduced into the chamber using an airlock. The airlock greatly reduces sample exchange times, and it accepts up to 8" wafer holders.
-The Balzer Sputter is located in the same room as the SEM Supra 1 and can be used to cover samples (for instance polymer samples from  the Polymer Injection Molding tool) with a thin gold layer before SEM inspection to avoid charging problems.
-Only users with samples that are somehow related to the cleanroom can use this SEM. Other users will have to contact DTU CEN.
+The SEM is equipped with an Oxford Instruments X-MaxN 50 EDX detector and AZtec software. EDX (Energy dispersive X-ray) detection is used for element composition analysis in a small area. A specific training is needed for users that want to use the EDX detector.
+The SEM Supra2 in located in the cleanroom. It was installed in December 2013.
 '''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''
-[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=327 SEM Supra 1 info page in LabManager],
+[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=327 SEM Supra 2 info page in LabManager]