Specific Process Knowledge/Characterization/SEM LEO: Difference between revisions

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	However, the SEM LEO has now been equipped with a Raith e-beam lithography system, and from the turn of the year 2015-2016 it is exclusively dedicated to the users of the Raith E-beam lithography, so system so general imaging of user samples is no longer allowed.		However, the SEM LEO has now been equipped with a Raith e-beam lithography system, and from the turn of the year 2015-2016 it is exclusively dedicated to the users of the Raith E-beam lithography, so system so general imaging of user samples is no longer allowed.

	The SEM LEO ~~was installed~~ in the cleanroom in ~~the~~ 1998, and the software was ungraded in 2012.		The SEM LEO is located in the cleanroom. It was installed in 1998, and the software was ungraded in 2012.