Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By BGHE: Difference between revisions
Created page with "I tried with two different gas regimes: CF4 and C4F8. I only made a few tests with CF4 since I got a very bad selectivity to the resist mask and I dicided to go for the C4F8 i..." |
|||
| Line 39: | Line 39: | ||
|| | || | ||
[[image:ICP_metal_s007258_15.jpg|100px|thumb|center| s007350 2µm pitch]] | [[image:ICP_metal_s007258_15.jpg|100px|thumb|center| s007350 2µm pitch]] | ||
|| | || | ||
[[image:ICP_metal_s007350_09.jpg|100px|thumb|center| s007350 2µm pitch]][[image:ICP_metal_s007350_13.jpg|100px|thumb|center| s007350 1µm pitch]] | [[image:ICP_metal_s007350_09.jpg|100px|thumb|center| s007350 2µm pitch]][[image:ICP_metal_s007350_13.jpg|100px|thumb|center| s007350 1µm pitch]] | ||
Revision as of 10:37, 3 May 2016
I tried with two different gas regimes: CF4 and C4F8. I only made a few tests with CF4 since I got a very bad selectivity to the resist mask and I dicided to go for the C4F8 instead.
C4F8
CF4
| Parameter | s006687 | s006701 | s007258 | s007350 | s007352 |
|---|---|---|---|---|---|
| Mask material | 750nm KRF | 750nm KRF | 750nm KRF | 750 nm KRF | 750nm KRF |
| Barc etch | none | none | none | none | none |
| Coil power | 800W | 800W | 800w | 800w | 800w |
| Platen power | 100W | 100W | 100w | 60W | 30w |
| Pressure | 4mTorr | 4mTorr | 4mTorr | 4mTorr | 4mTorr |
| Flow rate CF4 | 20sccm | 25sccm | 30sccm | 30sccm | 30sccm |
| Flow rate H2 | 20sccm | 15sccm | 10sccm | 10sccm | 10sccm |
| T | 0 | 0 | 0 | 0 | 0 |
| Process time | 10min | 10min | 2min30 | 2min30 | 3min30 |
| Comment | Little resist left, Trenching | A little trenching | very little trenching in large lines - anti trenching in small lines | ||
| Results |
  |
  |
 |
  |
  |
| Etch depth in SiO2 | 374nm | 505nm | 578nm | 336nm | 235nm |
| Etch rate | 37.4nm/min | 50.5nm/min | 134.4nm/min | 88nm/min | |
| Etch depth in resist | 345nm | 633nm | 700nm | 405nm | 308nm |
| Selectivity (resist:SiO2) | 1:1.1 | 1:0.80 | 1:0.83 | 1:0.83 | 1:0.76 |