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The SEM is located in basement outside the cleanroom. The Balzer Sputter is located in the same room and can be used to cover samples (for instance polymer samples from  the Polymer Injection Molding tool) with a thin gold layer before SEM inspection.  
The SEM is located in basement outside the cleanroom. The Balzer Sputter is located in the same room and can be used to cover samples (for instance polymer samples from  the Polymer Injection Molding tool) with a thin gold layer before SEM inspection.  


The SEM LEO was installed in the cleanroom in the 1998, and the software was ungraded in 2012.  
The SEM Supra 1 is the newest SEM at Danchip. It was installed in the cleanroom ...




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