Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong: Difference between revisions

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 ==Part2==
+{|  class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=517 style='width:388.0pt;border-collapse:collapse'  style='height:36.0pt'
+|  width=163 valign=top style='width:122.0pt;border:solid white 1.0pt;  border-bottom:solid white 3.0pt;background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;  height:36.0pt' | <p class=MsoNormal>ICP metal etch SiO2 by reist mask try</p>
+|  width=192 valign=top style='width:144.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p>
+|  width=163 valign=top style='width:122.0pt;border-top:solid white 1.0pt;  border-left:none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:36.0pt' | <p class=MsoNormal><span lang=DA>stable plasma at 2.5mtorr</span></p>
+|-  style='height:31.25pt'
+|  width=163 valign=top style='width:122.0pt;border-top:none;border-left:  solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>Date</span></p>
+|  width=192 valign=top style='width:144.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>Feb28204am</span></p>
+|  width=163 valign=top style='width:122.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:31.25pt' | <p class=MsoNormal><span lang=DA>March012013, 21</span></p>
+|-  style='height:26.15pt'
+|  width=163 valign=top style='width:122.0pt;border-top:none;border-left:  solid white 1.0pt;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>Metal ICP  recipe</span></p>
+|  width=192 valign=top style='width:144.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p>
+|  width=163 valign=top style='width:122.0pt;border-top:none;border-left:  none;border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;  background:#4F81BD;padding:3.6pt 7.2pt 3.6pt 7.2pt;height:26.15pt' | <p class=MsoNormal><span lang=DA>pxSiO2try9</span></p>
+|-  style='height:28.9pt'
+|  width=163 style='width:122.0pt;border-top:none;border-left:solid white 1.0pt;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>6inch,</span></p><p class=MsoNormal><span lang=DA>6A1_march012013</span></p>
+|-  style='height:53.85pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal><span lang=DA>Mask</span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc
+sec by Ox plasma</p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:53.85pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 490nm apox, first etch barc
+sec by Ox plasma</p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Etch time</span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>5min</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>65min</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Pressure [mTorr] </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>2.5</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>2.5</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>C4F8 flow [sccm] </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>8</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>8</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>CF4 flow [sccm] </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>H2 flow [sccm] </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>30</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>30</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>CH4 flow [sccm] </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>0</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Coil Power [W] </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>800 reflect 8W</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>800 reflect 8W</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Platen Power [W] </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>150reflect 0.2w</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>150reflect 0.2w</span></p>
+|-  style='height:28.9pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>Platen temperature [<sup>o</sup>C] </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>20</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:28.9pt' | <p class=MsoNormal><span lang=DA>20</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Coil match</span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>68.87%,23.1%</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>68.87%,23.1%</span></p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Platen Match</span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>33.0%,54.4%</span></p>
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>33.0%,54.4%</span></p>
+|-  style='height:45.6pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' | <p class=MsoNormal><span lang=DA>Throde valve opening rate</span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' |
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #E9EDF4;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:45.6pt' | <p class=MsoNormal>10.8% to 11.7%, pressure 2.11 to 2.40, not stable</p>
+|-  style='height:25.4pt'
+|  width=163 style='width:122.0pt;border:solid white 1.0pt;border-top:none;  background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>Comments </span></p>
+|  width=192 style='width:144.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' |
+|  width=163 style='width:122.0pt;border-top:none;border-left:none;  border-bottom:solid white 1.0pt;border-right:solid white 1.0pt;background:  #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:25.4pt' | <p class=MsoNormal><span lang=DA>SiO2 width 230nm</span></p>
+|}<p class=MsoNormal><span lang=DA>&nbsp;</span></p>
 =With CF4 and H2 chemistry=