Specific Process Knowledge/Characterization/SEM Supra 1: Difference between revisions

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 [[image:LA_SEM_Supra_1.jpg|300x300px|right|thumb|The SEM Supra 1]]
-=SEM LEO=
+=SEM Supra 1=
-[[image:IMG_3290.jpg|400x400px|right|thumb|The SEM LEO]]
+The SEM Supra 1 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.
-The SEM LEO is a scanning electron microscope. It is a very reliable and rugged instrument that provides high quality SEM  images of most samples, and it has excellently served the users of the cleanroom for many years. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the SEM.
+The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the HV detectors will no longer work.
-However, the SEM LEO has now been equipped with a Raith e-beam lithography system, and from the turn of the year 2015-2016 it is exclusively dedicated to the users of the Raith E-beam lithography, so system so general imaging of user samples is no longer allowed.
+The SEM is the training SEM at DTU Danchip. It means that all new SEM users with no and little SEM experience much be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on other SEM's.
+The SEM Supra 1 (formerly known as SEM Zeiss) has been relocated to the basement with two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on other SEM's.
+The SEM is located in basement outside the cleanroom. The Balzer Sputter is located in the same room and can be used to cover samples (for instance polymer samples from  the Polymer Injection Molding tool) with a thin gold layer before SEM inspection.
 The SEM LEO was installed in the cleanroom in the 1998, and the software was ungraded in 2012.