Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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* ~ 5 | * ~ 5 nm (limited by vibrations) | ||
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* 1-2 nm (limited by vibrations) | * 1-2 nm (limited by vibrations) | ||
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==Comparison of the SEM's at CEN [[image:Under_construction.png|50px]]== | ==Comparison of the SEM's at CEN [[image:Under_construction.png|50px]]== | ||