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Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

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* ~ 5 nanometers (limited by vibrations)
* ~ 5 nm (limited by vibrations)
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* 1-2 nm (limited by vibrations)
* 1-2 nm (limited by vibrations)
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==Comparison of the SEM's at CEN [[image:Under_construction.png|50px]]==
==Comparison of the SEM's at CEN [[image:Under_construction.png|50px]]==