Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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image:Spin_dryer_3.jpg|Spin dryer 3 for 4" wafers (top) and 6" wafers (bottom) in D-3. | image:Spin_dryer_3.jpg|Spin dryer 3 for 4" wafers (top) and 6" wafers (bottom) in D-3. | ||
image:Spin_dryer_4.jpg|Spin dryer 4 for 4 " wafers (bottom) and 6" wafers (top) in E-4. The cabinet for 6" wafers can also be used for 2" wafers if the insert is placed in the cabinet. | image:Spin_dryer_4.jpg|Spin dryer 4 for 4 " wafers (bottom) and 6" wafers (top) in E-4. The cabinet for 6" wafers can also be used for 2" wafers if the insert is placed in the cabinet. | ||
image:Spin_dryer_5.JPG| | image:Spin_dryer_5.JPG|Spin dryer 5 for 8", 6" and 4" wafers in the same chamber, with different carrier holders. | ||
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