Specific Process Knowledge/Characterization/SEM LEO: Difference between revisions

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 |style="background:WhiteSmoke; color:black"|<b>SEM LEO (Leo 1550 SEM)</b>
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-!style="background:silver; color:black;" align="center" width="60"|Purpose
+!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Purpose
 |style="background:LightGrey; color:black"|Imaging and measurement of
 |style="background:WhiteSmoke; color:black"|
 *Any (semi)conducting sample that may have thin (> ~ 5 µm) layers of non-conducting materials on top
+|-
+|style="background:LightGrey; color:black"|Other purpose
+|style="background:WhiteSmoke; color:black"|
+*E-beam lithography using Raith Elphy Quantum system
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 !style="background:silver; color:black;" align="center" width="60"|Location
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 *Any standard cleanroom materials.
-Use dedicated samples holders for samples from Black Magic PECVD
 |-
 |}