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*[[Technology_Research/Fabrication_of_Hyperbolic_Metamaterials_using_Atomic_Layer_Deposition/EMT_Process_development|Procces development]]
*[[Technology_Research/Fabrication_of_Hyperbolic_Metamaterials_using_Atomic_Layer_Deposition/EMT_Process_development|Procces development]]


===Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition===
===Fabrication of High Aspect Ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Nanogratings by Atomic Layer Deposition===
Shkondin, Takayama, O., Lindhard, J., Larsen, P., Mar, M.,Jensen F. & Lavrinenko, A.
Shkondin, E., Takayama, O., Lindhard, J., Larsen, P., Mar, M.,Jensen, F. & Lavrinenko, A.
(2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016)  [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK]
(2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016)  [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK]


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