Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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The two remaining SEM's at Danchip (called SEM Supra 2 and SEM Supra 3) serve as general imaging tools in the cleanroom. Like Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector. | The two remaining SEM's at Danchip (called SEM Supra 2 and SEM Supra 3) serve as general imaging tools in the cleanroom. Like Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector. | ||
== Scanning electron microscopy at CEN [[image:Under_construction.png|50px]]== | |||
== Common challenges in scanning electron microscopy == | == Common challenges in scanning electron microscopy == | ||
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==Comparison of the SEM's at CEN [[image:Under_construction.png|50px]]== | ==Comparison of the SEM's at CEN [[image:Under_construction.png|50px]]== | ||