Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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The two remaining SEM's at Danchip (called SEM Supra 2 and SEM Supra 3) serve as general imaging tools in the cleanroom. Like Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector. | The two remaining SEM's at Danchip (called SEM Supra 2 and SEM Supra 3) serve as general imaging tools in the cleanroom. Like Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector. | ||
'''The user manuals, quality control procedures and results, user APVs, technical information and contact information can be found in LabManager:'''<br> | '''The user manuals, quality control procedures and results, user APVs, technical information and contact information can be found in LabManager:'''<br> | ||
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* [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=361| The SEM Supra 3 page in LabManager], | * [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=361| The SEM Supra 3 page in LabManager], | ||
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SEM's at DTU-Cen: | SEM's at DTU-Cen: | ||
* [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=347| The Dual beam FEI Helios Nanolab 600 page in LabManager], | * [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=347| The Dual beam FEI Helios Nanolab 600 page in LabManager], | ||
* [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=239| The SEM FEI Nova NanoSEM 600 page in LabManager], | * [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=239| The SEM FEI Nova NanoSEM 600 page in LabManager], | ||
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