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Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

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{| border="2" cellspacing="0" cellpadding="0"  
{| border="2" cellspacing="0" cellpadding="0"  
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
|style="background:WhiteSmoke; color:black" align="center"|[[Specific Process Knowledge/Characterization/SEM LEO|SEM Leo]]
|style="background:WhiteSmoke; color:black" align="center"|[[Specific Process Knowledge/Characterization/SEM LEO|SEM LEO]]
|style="background:WhiteSmoke; color:black" align="center"|[[/Supra1|SEM Supra 1]]
|style="background:WhiteSmoke; color:black" align="center"|[[/Supra1|SEM Supra 1]]
|style="background:WhiteSmoke; color:black" align="center"|[[/Supra2|SEM Supra 2]]
|style="background:WhiteSmoke; color:black" align="center"|[[/Supra2|SEM Supra 2]]
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|style="background:LightGrey; color:black"| Imaging and measurement of
|style="background:LightGrey; color:black"| Imaging and measurement of
|style="background:WhiteSmoke; color:black"|
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* Any (semi)conducting sample that may have thin (> ~ 5 µm) layers of non-conducting materials on top
* Any (semi)conducting sample that may have thin (~ 5 µm <) layers of non-conducting materials on top
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Any sample except bulk insulators such as polymers, glass or quartz wafers
* Any sample except bulk insulators such as polymers, glass or quartz wafers
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* Any sample except bulk insulators such as polymers, glass or quartz wafers
* Any sample except bulk insulators such as polymers, glass or quartz wafers
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Samples from the 'real' world outside the lab
* Any sample except bulk insulators such as polymers, glass or quartz wafers
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* Conductive samples-->
* Conductive samples-->
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* 1-2 nm (limited by vibrations)
* 1-2 nm (limited by vibrations)
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|style="background:WhiteSmoke; color:black"|
* 20 nm (limited by instrument)
* 1-2 nm (limited by vibrations)
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* ~3.5 nm (limited by instrument)-->
* ~3.5 nm (limited by instrument)-->
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* Secondary electron (Se2)
* Secondary electron (Se2)
* Inlens secondary electron (Inlens)
* Inlens secondary electron (Inlens)
* 4 Quadrant Backscatter electron (QBSD) (out of order)
* 4 Quadrant Backscatter electron (QBSD)  
* Variable pressure secondary electron (VPSE)
* Variable pressure secondary electron (VPSE)
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
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* Variable pressure secondary electron (VPSE)
* Variable pressure secondary electron (VPSE)
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Secondary electron (SEI)
* Secondary electron (Se2)
* Backscatter electron (BEI)
* Inlens secondary electron (Inlens)
* High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB)
* Variable pressure secondary electron (VPSE)
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* Secondary electron (Everhart-Thornley (ETD))
* Secondary electron (Everhart-Thornley (ETD))
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* Z: XXX mm
* Z: XXX mm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* X, Y: 73 &times; 40 mm
* X, Y: 130 &times; 130 mm
* T: -10 to 90<sup>o</sup>  
* T: -4 to 70<sup>o</sup>
* R: 360<sup>o</sup>  
* R: 360<sup>o</sup>  
* Z: 38 mm
* Z: 50 mm
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* X, Y: 25 &times; 25 mm
* X, Y: 25 &times; 25 mm
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* FEG (Field Emission Gun) source
* FEG (Field Emission Gun) source
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Tungsten filament
* FEG (Field Emission Gun) sour
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* Tungsten filament-->
* Tungsten filament-->
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* Variable at Low vacuum (0.1 mbar-2 mbar)
* Variable at Low vacuum (0.1 mbar-2 mbar)
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Fixed at High vacuum
* Fixed at High vacuum (2 &times; 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar)
* Variable at Low vacuum (0.1 mbar-2 mbar)
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* High vacuum and Low vacuum-->
* High vacuum and Low vacuum-->
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* Oxford Instruments X-Max<sup>N</sup> 50 mm<sup>2</sup> SDD EDX detector and AZtec software package
* Oxford Instruments X-Max<sup>N</sup> 50 mm<sup>2</sup> SDD EDX detector and AZtec software package
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB)
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* Focused ion beam (FIB) (Ga<sup>+</sup> ions)-->
* Focused ion beam (FIB) (Ga<sup>+</sup> ions)-->
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* Up to 8" wafer with 6" view
* Up to 8" wafer with 6" view
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|style="background:WhiteSmoke; color:black"|
* Up to 4" wafer
* Up to 6" wafer with full view
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* Wafers won´t fit without a proper holder. The height of the sample is critical, should be as small, as possible-->
* Wafers won´t fit without a proper holder. The height of the sample is critical, should be as small, as possible-->
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Any standard cleanroom material including graphene or CNT samples
* Any standard cleanroom material including graphene or CNT samples
* Biological samples
<!--|style="background:WhiteSmoke; color:black"|
<!--|style="background:WhiteSmoke; color:black"|
* Conductive materials
* Conductive materials
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