Specific Process Knowledge/Lithography/SU-8: Difference between revisions
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* Another way to get a thinner layer is dilute SU-8 2002 in cyclopentanone solution (25ml SU-8 in 80ml cyclopentanone) gives 120nm layer with 7000rpm spinning (the test done by Irene Fernandez-Cuesta and Nimi Gopalakrishnan from Nanotech). | * Another way to get a thinner layer is dilute SU-8 2002 in cyclopentanone solution (25ml SU-8 in 80ml cyclopentanone) gives 120nm layer with 7000rpm spinning (the test done by Irene Fernandez-Cuesta and Nimi Gopalakrishnan from Nanotech). | ||
* To achieve a thickness between 80nm and 60nm dilute SU-8 2002 in cycopentanone in proportion 5ml SU-8 to 32 ml cyclopentanone. This test is done by Luca Pietrobon from Nanotech. See the spinning curves here.[[media:5ml_SU8_2002_in32ml_cycl.PNG|Diluted SU8 2002.]] | * To achieve a thickness between 80nm and 60nm dilute SU-8 2002 in cycopentanone in proportion 5ml SU-8 to 32 ml cyclopentanone. This test is done by Luca Pietrobon from Nanotech. See the spinning curves here. [[media:5ml_SU8_2002_in32ml_cycl.PNG|Diluted SU8 2002.]] | ||
==Baking== | ==Baking== | ||