Specific Process Knowledge/Lithography/SU-8: Difference between revisions
Created page with " SU8 is an epoxy based negative i-line photoresist with a high contrast. More then 10:1 aspect ratio imaging with vertical sidewalls is one of the widely used properties of ..." |
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In Danchip the SU8 2000 product line is widely used, where the SU8-2005 and SU8-2075 are supplied by Danchip. Other resit formulation can be used but has to be ordered by the user him/herself. | In Danchip the SU8 2000 product line is widely used, where the '''SU8-2005''' and '''SU8-2075''' are supplied by Danchip. Other resit formulation can be used but has to be ordered by the user him/herself. | ||
Process recommendations: | Process recommendations: | ||