Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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* 1064nm : 80W | * 1064nm : 80W | ||
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!style="background:silver; color:black" align="left" valign="top" rowspan=" | !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates | ||
|style="background:LightGrey; color:black"|Material allowed | |style="background:LightGrey; color:black"|Material allowed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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* Topas | * Topas | ||
* Nickel | * Nickel | ||
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|style="background:LightGrey; color:black"|Material NOT allowed | |||
|style="background:WhiteSmoke; color:black"| | |||
* PTFE (teflon) | |||
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!style="background:silver; color:black" align="left" valign="top" rowspan="1"|Parameters | !style="background:silver; color:black" align="left" valign="top" rowspan="1"|Parameters | ||