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== Contrast Curves ==
== Contrast Curves ==


100 nm lines in ~145 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) with and without agitation at room temperature and at 5 degrees Celsius. Furthermore, same pattern ahs been developed with N50 (standard developer for ZEP520A).
100 nm lines in both ~70 nm and ~188 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) at room temperature.  


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!colspan="5"|wafer 9.19 Contrast Curve, Processed by TIGRE, Dec-Jan 2014-2015
!colspan="5"|CSAR Contrast Curve, Processed by TIGRE, FEB-MARCH 2016
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|CSAR AR-P6200 AllResist
|CSAR AR-P6200 AllResist, CSAR AR-P6200 diluted 1:1 in Anisole
|19-12-2014, LabSpin A-1, 4000 rpm, 60s, softbaked 60s @ 150degC
|08-02-2016, LabSpin E-5, 4000 rpm, 60s, softbaked 60s @ 205 degC
|19-12-2014, JBX9500 E-2, 2nA aperture 5, doses 60-600 µC/cm2, 100 nm lines and spaces
|09-02-2016, JBX9500 E-2, 2nA aperture 5, doses 40-600 µC/cm2, 100 nm lines and 300 nm spaces
|22-12-2014, 05-01-2015, Fumehood D-2, misc developers, rinsed in IPA 60s. The cold development was performed with developer stored in refrigerator (Cx1), exact temperature was not measured.
|11-02-2016, Fumehood D-2, AR-600-546, rinsed in IPA 60s.
|23-12-2014, 05-01-2015, Zeiss Supra 60VP, 10kV, Inlens detector, stage at - 4-5 degrees. Samples '''not''' coated before inspection.
|02-03-2016 AFM Icon, F-2, ScanAsyst in Air
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[[File:ContrastCurvesCSAR.png|500px]]
[[File:ContrastCurvesCSAR_March2016_log.png|500px]]
[[File:w919sa-d.png|500px]]


== Dosetests ==
== Dosetests ==
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