Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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![[Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch)|ASE]] | ![[Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch)|ASE]] | ||
![[Specific Process Knowledge/ | ![[Specific Process Knowledge/Lithography/Strip#Plasma_Asher_1|Plasma asher 1]] | ||
![[Specific Process Knowledge/ | ![[Specific Process Knowledge/Lithography/Strip#Plasma_Asher_2|Plasma asher 2]] | ||
![[Specific Process Knowledge/Etch/RIE (Reactive Ion Etch)|RIE2]] | ![[Specific Process Knowledge/Etch/RIE (Reactive Ion Etch)|RIE2]] | ||
!Wet Polymer stripping | !Wet Polymer stripping | ||