Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions
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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip | ===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip=== | ||
Recipe used: Ti etch | Recipe used: Ti etch | ||
[[image:TiO2_etch_Evgeniy2.jpg|400px]] | [[image:TiO2_etch_Evgeniy2.jpg|400px]] | ||
Revision as of 14:28, 10 February 2016
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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip
Recipe used: Ti etch
