Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions

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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip
Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip


[[image:Under_construction.png|400px]]
Recipe used: Ti etch
Recipe used: Ti etch
[[image:TiO2_etch_Evgeniy2.jpg|400px]]
[[image:TiO2_etch_Evgeniy2.jpg|400px]]

Revision as of 14:25, 10 February 2016

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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip

Recipe used: Ti etch