Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions
No edit summary |
No edit summary |
||
Line 5: | Line 5: | ||
Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip | Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip | ||
Recipe used: Ti etch | Recipe used: Ti etch | ||
[[image:TiO2_etch_Evgeniy2.jpg|400px]] | [[image:TiO2_etch_Evgeniy2.jpg|400px]] |
Revision as of 14:25, 10 February 2016
Feedback to this page: click here
Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip